Interesting reads related to CMOS and MEMS fabrication

Low cost UV laser direct write photolithography system for rapid prototyping of microsystems

J. Waynelovich, A. Seperi, B. Mehta, S. Kassegne, A. Khosla 2012 http://ma.ecsdl.org/content/MA2012-02/59/3990.full.pdf

Microscope Projection Photolithography for Rapid prototyping of Masters with Micron-Scale Features for Use in Soft Lithography

J. Christopher Love, Daniel B. Wolfe, Heiko O. Jacobs, George M. Whitesides 2001 https://gmwgroup.harvard.edu/pubs/pdf/757.pdf

Etch Rates for Micromachining Processing Part II

Kirt R. Williams, Kishan Gupta, Matthew Wasilik 2003 http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf

Tantalum oxide thin films as protective coatings for sensors

Carsten Christensen, Roger De Reus, Siebe Bouwstra 1999 http://orbit.dtu.dk/files/4645876/Christensen.pdf